Applications:
- Bake - Long term thermal bake applications where wafers are left in ovens for multiple days.
- Thick Wafers - Bonded or thick wafer applications where industry standard plastic cassettes will not work due to slot dimensions.
The WHS-M4 Series is a Stainless Steel cassette engineered for 300 mm (12") wafers and optimized for high-temperature process environments. Fully SEMI compliant and compatible with all 300 mm load ports, it integrates seamlessly into automated handling systems.
The M4 provides exceptional abrasion resistance and long-term stability in thermal and bake applications up to 550°C.
The WHS-M4 features a 25-slot design with a 10 mm (0.393") pitch that matches the profile of an industry-standard FOUP, while offering significantly reduced weight for easier manual handling. A built-in locking latch bar adds an extra layer of safety by preventing wafer movement during transport, even in the case of operator error.
For enhanced ergonomics, the cassette includes SEMI S8-compliant side handles with a power-grip profile, ensuring secure, comfortable handling in cleanroom environments. Robust enough for thick or bonded wafers, the stainless steel M4 cassette delivers precise wafer positioning and reliable performance across demanding thermal and automated processes.
Manufactured in an ISO 9001–certified facility and CE certified, the WHS-M4 offers proven safety, durability, and long-term reliability for advanced semiconductor wafer management.
