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Replacement epitaxy cassettes

(1)

Aluminum cassettes

(11)

Legacy cassettes

(2)

Stainless steel cassettes

(1)

300 mm cassettes

(2)

Metal cassette handles

(3)

Material

Aluminum

Stainless Steel

Wafer size

300 mm (12”)

Slots

25

Top/bottom

End wall / docking option

Handle

With handle

Max. operating temp.

Up to 350°C

Up to 550°C

Surface finish

Hard Clear Anodized (HC)

Process Cassettes 300 mm

2products

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Stainless Steel FOUP cassette 300 mm (WHS-M4)

WHS-M4-1807000

300 mm cassettes

WHS

Stainless Steel FOUP cassette 300 mm (WHS-M4)

300 mm (12”)

25

End wall / docking option

With handle

Up to 550°C

Webshop

Aluminum metal process cassette 300 mm (WHS-M4)

WHS-M4-1807002

300 mm cassettes

WHS

Aluminum metal process cassette 300 mm (WHS-M4)

300 mm (12”)

25

End wall / docking option

With handle

Up to 350°C

Hard Clear Anodized (HC)