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Manual wafer transfer

(2)

Automatic wafer transfer

(1)

Safeguard wafer transfer

(1)

(1)

Material

Guides: Antistatic Polyoxymethylene | Stage: Natural Polypropylene

Wafer size

100 mm (4”)

150 mm (6”)

200 mm (8”)

76 mm (3”)

System

Automatic system

Slots

Up to 25

Material arm

Antistatic Polyoxymethylene

Cleanroom designation

ISO 4 (FS209E Class 10)

Automatic wafer transfer

1product

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Automatic slide transfer (WHS-T2)

WHS-T2

Automatic wafer transfer

WHS

Automatic slide transfer (WHS-T2)

The T2 Series LCT1AS12 is a precision automatic horizontal bulk wafer slide transfer for safely transferring 76 mm up to 200 mm wafers between two SEMI complian

4 Sizes:

Automatic slide transfer (WHS-T2) 76 mm (3”)

Automatic slide transfer (WHS-T2) 100 mm (4”)

Automatic slide transfer (WHS-T2) 150 mm (6”)

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