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Material

Stainless steel SST

Wafer size

100 mm (4”)

150 mm (6”)

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Slots

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Max. operating temp.

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Stainless Steel Process Cassettes

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Stainless steel cassette (WHS-M3)

WHS-M3

Stainless steel cassettes

WHS

Stainless steel cassette (WHS-M3)

4 Sizes:

Stainless steel cassette (WHS-M3) 76 mm (3”)

Stainless steel cassette (WHS-M3) 100 mm (4”)

Stainless steel cassette (WHS-M3) 150 mm (6”)

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