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Manual wafer transfer
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Automatic wafer transfer
(1)
Safeguard wafer transfer
(1)
Wafer sorter
(1)
Material
End effector: Antistatic carbon fiber
Wafer size
100 mm (4")
150 mm (6”)
200 mm (8”)
Dual size 150 + 200 mm (6”- 8”)
System
Automatic system
Slots
Up to 26
Cleanroom designation
ISO 3 (Class 1 FS209E)

Wafer sorter

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2-Cassette automation sorter with OCR (WHS-T4)
WHS-T4
Wafer sorter
WHS
2-Cassette automation sorter with OCR (WHS-T4)
100 mm (4”), 150 mm (6”) or 200 mm (8”) wafers
Automatic
25 Slots
View product
4 Sizes:
2-Cassette automation sorter with OCR (WHS-T4) 100 mm (4")2-Cassette automation sorter with OCR (WHS-T4) 150 mm (6”)2-Cassette automation sorter with OCR (WHS-T4) Dual Size 150 + 200 mm (6”- 8”)
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