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Material
Antistatic Polyoxymethylene
Wafer size
150 mm (6”)
200 mm (8”)
System
Automatic system
Slots
Up to 25
Up to 26
Material roller
Antistatic Polyurethane
Aligning accuracy
Better than +/- 1°
Cleanroom designation
ISO 3 (Class 1 FS209E)
Automatic notch aligner
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Wafer aligners
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Category
Material
Antistatic Polyoxymethylene
Wafer size
150 mm (6”)
200 mm (8”)
System
Automatic system
Slots
Up to 25
Up to 26
Material roller
Antistatic Polyurethane
Aligning accuracy
Better than +/- 1°
Cleanroom designation
ISO 3 (Class 1 FS209E)
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WHS-A3
Automatic notch aligner
WHS
The WHS-A3 Serie ANFEZ Advanced technology automatic wafer notch aligner for alignment of 150 or 200 mm notch wafers.
Automatic System
Wafers for 25 Slot Cassettes