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Manual flat aligner

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Automatic flat aligner

(1)

Manual notch aligner

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Automatic notch aligner

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Material

Anti-static POM

Wafer size

150 mm (6”)

200 mm (8”)

System

Automatic system

Slots

Up to 25

Up to 26

Material roller

Anti-static propriertary

Aligning accuracy

Better than +/- 1°

Cleanroom designation

ISO 3

Automatic notch aligner

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Automatic notch aligner (WHS-A3)

WHS-A3

Automatic notch aligner

WHS

Automatic notch aligner (WHS-A3)

The WHS-A3 Serie ANFEZ Advanced technology automatic wafer notch aligner for alignment of 150 or 200 mm notch wafers.

Automatic System

Wafers for 25 Slot Cassettes

2 Sizes:

Automatic notch aligner (WHS-A3) 150 mm (6”)

Automatic notch aligner (WHS-A3) 200 mm (8”)