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Aluminum cassettes
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Material
Aluminum
Wafer size
100 mm (4”)
150 mm (6”)
200 mm (8”)
76 mm (3”)
Slots
13
25
Top/bottom
Cover-plate / H-bar
Flat Slot
H-bar / H-bar
Handle
No handle
With handle
Max. operating temp.
Up to 350°C
Surface finish
Hard Clear Anodized (HC)

Aluminum Process Cassettes

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Process aluminum cassette BI-PITCH 13 slot flat slot-/thin wafer (WHS-M1)
WHS-M1-18077
Aluminum cassettes
WHS
Process aluminum cassette BI-PITCH 13 slot flat slot-/thin wafer (WHS-M1)
13-slots
Flat Slot
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5 Sizes:
Process aluminum cassette BI-PITCH 13 slot flat slot-/thin wafer (WHS-M1) 76 mm (3”)Process aluminum cassette BI-PITCH 13 slot flat slot-/thin wafer (WHS-M1) 76 mm (3") with HandleProcess aluminum cassette BI-PITCH 13 slot flat slot-/thin wafer (WHS-M1) 100 mm (4") with Handle
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Webshop
Process aluminum cassette, (AL, HC) 3" - 25 slot, angled slot (standard) (WHS-M1)
WHS-M1-5
Aluminum cassettes
WHS
Process aluminum cassette, (AL, HC) 3" - 25 slot, angled slot (standard) (WHS-M1)
The WHS-M1 Series MCF is an all aluminum 76 mm (3") 25-slot metal cassette for processing semiconductor wafers in a thermal environment, up to 350° C.
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3 Sizes:
Process aluminum cassette, (AL, HC) 3" - 25 slot, angled slot (standard) (WHS-M1) standard: cover-plate (top), H-BAR (bottom)Process aluminum cassette, (AL, HC) 3" - 25 slot, angled slot (standard) (WHS-M1) cover-plate (top), H-BAR (bottom) with handleProcess aluminum cassette, (AL, HC) 3" - 25 slot, angled slot (standard) (WHS-M1) H-BAR (top), H-BAR (bottom)
Webshop
Process aluminum cassette, (AL, HC) 4" - 25 slot, angled slot (standard) (WHS-M1)
WHS-M1-6
Aluminum cassettes
WHS
Process aluminum cassette, (AL, HC) 4" - 25 slot, angled slot (standard) (WHS-M1)
The WHS-M1 Series MCF is an all aluminum 100 mm (4") 25-slot metal cassette for processing semiconductor wafers in a thermal environment, up to 350° C.
View product
3 Sizes:
Process aluminum cassette, (AL, HC) 4" - 25 slot, angled slot (standard) (WHS-M1) standard: cover-plate (top), H-BAR (bottom)Process aluminum cassette, (AL, HC) 4" - 25 slot, angled slot (standard) (WHS-M1) cover-plate (top), H-BAR (bottom) with handleProcess aluminum cassette, (AL, HC) 4" - 25 slot, angled slot (standard) (WHS-M1) H-BAR (top), H-BAR (bottom)
Webshop
Process aluminum cassette, (AL, HC) 6" - 25 slot, angled slot (standard) (WHS-M1)
WHS-M1-7
Aluminum cassettes
WHS
Process aluminum cassette, (AL, HC) 6" - 25 slot, angled slot (standard) (WHS-M1)
The WHS-M1 Series MCF is an all aluminum 150 mm (6") 25-slot metal cassette for processing semiconductor wafers in a thermal environment, up to 350° C.
View product
3 Sizes:
Process aluminum cassette, (AL, HC) 6" - 25 slot, angled slot (standard) (WHS-M1) standard: cover-plate (top), H-BAR (bottom)Process aluminum cassette, (AL, HC) 6" - 25 slot, angled slot (standard) (WHS-M1) cover-plate (top), H-BAR (bottom) with handleProcess aluminum cassette, (AL, HC) 6" - 25 slot, angled slot (standard) (WHS-M1) H-BAR (top), H-BAR (bottom)
Webshop
Process aluminum cassette, (AL, HC) 8" - 25 slot, angled slot (standard) (WHS-M1)
WHS-M1-8
Aluminum cassettes
WHS
Process aluminum cassette, (AL, HC) 8" - 25 slot, angled slot (standard) (WHS-M1)
The WHS-M1 Series MCF is an all aluminum 200 mm (8") 25-slot metal cassette with option a end wall handle for processing semiconductor wafers in a thermal
View product
3 Sizes:
Process aluminum cassette, (AL, HC) 8" - 25 slot, angled slot (standard) (WHS-M1) cover-plate (top), H-BAR (bottom)Process aluminum cassette, (AL, HC) 8" - 25 slot, angled slot (standard) (WHS-M1) cover-plate (top), H-BAR (bottom) with handleProcess aluminum cassette, (AL, HC) 8" - 25 slot, angled slot (standard) (WHS-M1) H-BAR (top), H-BAR (bottom)