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Manual flat aligner
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Automatic flat aligner
(1)
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Material
Antistatic Polyoxymethylene 
Wafer size
100 mm (4”)
150 mm (6”)
200 mm (8”)
76 mm (3”)
Multisize 76,100,125,150 mm
System
Automatic system
Slots
Up to 25
Material roller
Antistatic Polyurethane
Aligning accuracy
Better than +/- 1°
Cleanroom designation
ISO 3 (Class 1 FS209E)

Automatic flat aligner

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Automatic wafer flat aligner (WHS-A1)
WHS-A1
Automatic flat aligner
WHS
Automatic wafer flat aligner (WHS-A1)
The WHS-A1 Serie AFEZ Advanced technology automatic wafer flat aligner for alignment from 76 mm up to 150 mm wafers.
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5 Sizes:
Automatic wafer flat aligner (WHS-A1) 76 mm (3”)Automatic wafer flat aligner (WHS-A1) 100 mm (4”)Automatic wafer flat aligner (WHS-A1) 150 mm (6”)
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