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Manual flat aligner

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Automatic flat aligner

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Material

Anti-static POM

Wafer size

100 mm (4”)

150 mm (6”)

200 mm (8”)

76 mm (3”)

Multisize 76,100,125,150 mm

System

Automatic system

Slots

Up to 25

Material roller

Anti-static propriertary

Aligning accuracy

Better than +/- 1°

Cleanroom designation

ISO 3

Automatic flat aligner

1product

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Automatic flat aligner (WHS-A1)

WHS-A1

Automatic flat aligner

WHS

Automatic flat aligner (WHS-A1)

The WHS-A1 Serie AFEZ Advanced technology automatic wafer flat aligner for alignment from 76 mm up to 150 mm wafers.

5 Sizes:

Automatic flat aligner (WHS-A1) 76 mm (3”)

Automatic flat aligner (WHS-A1) 100 mm (4”)

Automatic flat aligner (WHS-A1) 150 mm (6”)

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