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Manual wafer transfer

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Automatic wafer transfer

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Safeguard wafer transfer

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Material

Anti-static PEEK

Wafer size

100 mm (4”)

150 mm (6”)

200 mm (8”)

76 mm (3”)

System

Automatic system

Slots

Up to 25

Material rods

Carbon fiber

Cleanroom designation

ISO 3

Safeguard wafer transfer

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SafeGuard wafer transfer (WHS-T1)

WHS-T1

Safeguard wafer transfer

WHS

SafeGuard wafer transfer (WHS-T1)

The T1 Series LCT2 is advanced technology automatic SafeGuard bulk wafer transfer for 76 mm up to 200 mm wafers.

4 Sizes:

SafeGuard wafer transfer (WHS-T1) 76 mm (3”)

SafeGuard wafer transfer (WHS-T1) 100 mm (4”)

SafeGuard wafer transfer (WHS-T1) 150 mm (6”)

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