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Wafer escalators

(1)

5-wafer presenter

(1)

1-wafer presenter

(1)

Auto wafer presenter

(1)

Size

100 mm (4”)

150 mm (6”)

200 mm (8”)

76 mm (3”)

System

Automatic system

Slots

25

Table

With cleanroom table

Cleanroom designation

ISO 3

Auto wafer presenter

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Automatic single wafer presenter (WHS-P1)

WHS-P1

Auto wafer presenter

WHS

Automatic single wafer presenter (WHS-P1)

Automatic

76 mm (3”), 100 mm (4”), 150 mm (6”) or 200 mm (8”)

25-slots

8 Uitvoeringen:

Automatic single wafer presenter (WHS-P1) 76 mm (3”)

Automatic single wafer presenter (WHS-P1) 76 mm (3”) incl. table

Automatic single wafer presenter (WHS-P1) 100 mm (4”)

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