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Wafer escalators

(1)

5-wafer presenter

(1)

1-wafer presenter

(1)

Auto wafer presenter

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Size

100 mm (4”)

150 mm (6”)

200 mm (8”)

76 mm (3”)

System

Automatic system

Slots

25

Table

With cleanroom table

Cleanroom designation

ISO 3

Auto wafer presenter

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Automatic single wafer presenter (WHS-P1)

WHS-P1

Auto wafer presenter

WHS

Automatic single wafer presenter (WHS-P1)

Automatic

76 mm (3”), 100 mm (4”), 150 mm (6”) or 200 mm (8”)

25-slots

8 Sizes:

Automatic single wafer presenter (WHS-P1) 76 mm (3”)

Automatic single wafer presenter (WHS-P1) 76 mm (3”) incl. table

Automatic single wafer presenter (WHS-P1) 100 mm (4”)

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