Applications
- General use: Vacuum wands are utilized to pick up and transport wafers from one location to another without adding particles.
- Sorting: For manual wafer sorting applications, vacuum wands allow operators to move wafers safely and precisely within a parent lot. They can also be used to combine lots together, add test wafers, and replace any damaged wafers, as necessary.
- Inspection - Operators can use vacuum wands to pull out a wafer from a parent lot and inspect it under specialized lighting to look for defects. This ensures that the process has been successful and that the wafer meets the required specifications
- Rescue – Vacuum wands can be used to remove stranded substrates from cassettes, pods, and process tools when automation underperforms.
The WHS-V7-300 is an advanced 300 mm tabletop portable battery-powered vacuum wand allows independence from vacuum lines. Provides mobility to go anywhere in the cleanroom. The powerful vacuum pump, high performance battery and auto-shutoff holder allows this system to be used in a high production environment for multiple days on one charge. Ships with WHS-V2-LG wand, WHS-V3-CC Coilcord and 300 mm vacuum tip (WHS-V1-AP6NST). Designed for wafer rescue or heavy-production, 800mBar (23.6”Hg). ISO 3, FS209E Class 1.
