Metal cassettes

WHS offers a comprehensive range of semiconductor wafer metal cassettes designed for use in thermal cleanroom applications. These precision-engineered cassettes are built to meet the rigorous demands of high temperature processing environments, wafer automation, and transfer processes. All WHS cassettes comply with SEMI standards, ensuring compatibility with industry-standard equipment and high performance across various applications.

The WHS-M series includes four distinct models tailored to different needs. The flagship WHS-M1 (350° C) is an advanced all-aluminum cassette available in 25-slot (standard) and 13-slot (thin wafer) configurations. Its profile matches industry-standard plastic cassettes, ensuring seamless integration into automation and transfer systems. The WHS-M2 (250°C) is a legacy aluminum cassette with PTFE Teflon wafer stops, ideal for replacing older CVD process tools and providing reliable performance.

For high-temperature applications, the robust WHS-M3 is made entirely of stainless steel, capable of withstanding temperatures up to 550°C. The WHS-M4 offers two 300mm cassette options: one in aluminum and one in stainless steel, allowing flexibility based on specific process requirements. WHS metal cassettes are engineered with high-precision manufacturing and advanced materials, providing durability and reliability that semiconductor manufacturers can depend on.