Metal cassettes
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WHS offers a comprehensive range of semiconductor wafer metal cassettes designed for use in thermal cleanroom applications. These precision-engineered wafer carriers are built to meet the rigorous demands of high temperature processing environments, wafer automation, and transfer processes. All WaferHandlingSystem wafer cassettes comply with SEMI standards, ensuring compatibility with industry-standard equipment and high performance across various applications.
The WHS-M series includes four distinct models tailored to different needs. The flagship WHS-M1 (350° C) is an advanced all-aluminum wafer carrier available in 25-slot (standard) and 13-slot (thin wafer) configurations. Its profile matches industry-standard plastic cassettes, ensuring seamless integration into automation and transfer systems. The WHS-M2 (250°C) is a legacy aluminum cassette with PTFE Teflon wafer stops, ideal for replacing older CVD process tools and providing reliable performance.
For high-temperature applications, the robust WHS-M3 is made entirely of stainless steel, capable of withstanding temperatures up to 550°C. The WHS-M4 offers two 300 mm wafer cassette options: one in aluminum and one in stainless steel, allowing flexibility based on specific process requirements. WHS metal wafer cassettes are engineered with high-precision manufacturing and advanced materials, providing durability and reliability that semiconductor manufacturers can depend on.
