Manual wafer transfer for 76 mm to 200 mm wafers|Maintenance-free slide rails with UHMW bearings|Works with SEMI-compliant high/low profile cassettes|Antistatic, chemical-resistant, ISO 4 cleanroom safe|Optional models for wafer flipping/inverting
WHS
Manual wafer transfer (WHS-T3) 76 mm (3”)
WHS
Manual wafer transfer (WHS-T3) 76 mm (3”)
Choose your size:
Manual wafer transfer for 76 mm to 200 mm wafers
Maintenance-free slide rails with UHMW bearings
Works with SEMI-compliant high/low profile cassettes
Antistatic, chemical-resistant, ISO 4 cleanroom safe
Optional models for wafer flipping/inverting
Specifications
Brand
WHS
Product Number
WHS-T3-301
Remarks
*** NOTE: Please specify cassette model number(s) when ordering ***
Material
Guides: Antistatic Polyoxymethylene | Stage: Natural Polypropylene
Wafer size
76 mm (3”)
System
Manual system
Slots
Up to 25
Material arm
Antistatic Polyoxymethylene
Cleanroom designation
ISO 4 (FS209E Class 10)
Status
Request information
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