WHS

Legacy cassette, aluminum (coated), 25 slot, slot-shape angular (WHS-M2) 76 mm (3”)

Legacy cassette, aluminum (coated), 25 slot, slot-shape angular (WHS-M2) 76 mm (3”)

Product description

Applications:

  • Process Equipment -Thermal processes environments where the wafer is processed in the cassette above 43° C (110° F), the typical structural threshold upper limit of plastic process cassettes.  This includes chemical vapor deposition (CVD), rapid thermal processing (RTP) and wafer annealing applications.
  • High wafer insertion temperatures - Process equipment where wafer insertion temperatures (wafers coming out from the process tool) exceed the melting point of a plastic cassette.  The need for higher throughput reduces the amount of time the wafers are left inside the chamber to cool and acclimate. 
  • Precision carrier requirements - Moderate-thermal automation environments where there is a need for dimensional precision that a plastic cassette cannot offer.
  • Thick Wafers - Bonded or thick wafer applications where industry standard plastic cassettes will not work due to slot dimensions.

The M2 series is an all aluminum 76 mm (3”) 25-slot metal cassette for processing semiconductor wafers in a thermal environment, up to 250° C. A SEMI compliant cassette with straight side walls, stainless steel spacers, PTFE wafer stops, and 8° slot angles. All aluminum surfaces are (HC) hard clear anodized for prolonged abrasion resistance.

WHS

Legacy cassette, aluminum (coated), 25 slot, slot-shape angular (WHS-M2) 76 mm (3”)

Choose your size:
Aluminum with wear-resistant, smooth hard-coating and PTFE wafer stops
Heat-resistant up to 350°C (Al) / 250°C (PTFE)
Smooth slot-entry and - shape
Vacuum vented screws
Design according to SEMI-standard

Specifications

Brand
WHS
Product Number
WHS-M2-1807800
Remarks
SS Rod: 3x (top) 1x (bottom)
Material
Aluminum (coated)
Wafer size
76 mm (3”)
Slots
25
Top/bottom
PLATE
Max. operating temp.
Up to 250°C
Surface finish
Hard Clear Anodized (HC)
Status
Request information

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