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Aluminum cassettes
(5)
Legacy cassettes
(2)
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Material
Aluminum
Aluminum (coated)
Wafer size
100 mm (4”)
150 mm (6”)
200 mm (8”)
76 mm (3”)
Slots
25
Top/bottom
PLATE
PLATE / END WALL
Max. operating temp.
Up to 250°C
Surface finish
Hard Clear Anodized (HC)

Aluminum Box Cassettes

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Legacy cassette, aluminum (coated), 25 slot, slot-shape angular (WHS-M2)
WHS-M2
Legacy cassettes
WHS
Legacy cassette, aluminum (coated), 25 slot, slot-shape angular (WHS-M2)
The M2 series AMC is an all aluminum 25-slot metal cassette for processing semiconductor wafers in a thermal environment, up to 250° C.
View product
4 Sizes:
Legacy cassette, aluminum (coated), 25 slot, slot-shape angular (WHS-M2) 76 mm (3”)Legacy cassette, aluminum (coated), 25 slot, slot-shape angular (WHS-M2) 100 mm (4”)Legacy cassette, aluminum (coated), 25 slot, slot-shape angular (WHS-M2) 150 mm (6”)
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Webshop
Legacy cassette, aluminum (coated) top plate, 25 slot, slot-shape angular (WHS-M2)
WHS-M2-TP
Legacy cassettes
WHS
Legacy cassette, aluminum (coated) top plate, 25 slot, slot-shape angular (WHS-M2)
The M2 series AMC is an all aluminum 25-slot metal cassette for processing semiconductor wafers in a thermal environment, up to 250° C.
View product
4 Sizes:
Legacy cassette, aluminum (coated) top plate, 25 slot, slot-shape angular (WHS-M2) 76 mm (3”)Legacy cassette, aluminum (coated) top plate, 25 slot, slot-shape angular (WHS-M2) 100 mm (4”)Legacy cassette, aluminum (coated) top plate, 25 slot, slot-shape angular (WHS-M2) 150 mm (6”)
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