WHS

Economy manual flat aligner with dual knob (WHS-A6) 76 mm (3”)

Product description

Applications:

  • Alignment - Wafer flat and notch aligners are used in the semiconductor industry to ensure that wafers are oriented correctly during various processes, such as lithography, deposition, and etching. The flat aligner has a notch or flat that corresponds to the orientation of the wafer's crystal lattice structure. This is critical because the orientation of the wafer affects the performance and functionality of the final semiconductor device.
  • Lot integrity - Aligners are also used in the semiconductor industry to aid operators in performing lot integrity checks. By rotating the wafer scribe, which is the identification marking on the wafer's edge, to be visible to the operator, the operator can verify that the correct lot of wafers is being loaded into a production tool. This is an important step in preventing errors and ensuring consistent product quality.
  • Edge inspection - Wafer flat and notch aligners are also used in the semiconductor industry to inspect wafers for edge defects. This macro inspection procedure is usually done under a light source and involves examining the edges of the wafer for any chips, cracks, or other imperfections. This is an important step in preventing wafer breakage during subsequent processing steps, as edge defects can weaken the wafer and cause it to break or fail. By using wafer flat and notch aligners to identify and inspect these defects, operators can take steps to prevent further processing of defective wafers and avoid costly production delays.

 

The WHS-A5-301 is an economical antistatic flat aligner for top/bottom alignment of 76 mm primary wafer flats. Features advanced abrasion resistant, static dissipative stage and roller materials. Low maintenance and long life. ISO Class 4

WHS

Economy manual flat aligner with dual knob (WHS-A6) 76 mm (3”)

Choose your size:
Antistatic construction with wafer and cassette ground paths
Economic top/bottom flat aligner
Easy roller replacement (sping loaded)
Applications: alignment, lot integrity or edge inspection    

Specifications

Brand
WHS
Product Number
WHS-A5-301
Remarks
*** NOTE: Please specify cassette model number(s) when ordering ***
Material
Anti-static POM/anodized aluminum
Wafer size
76 mm (3”)
System
Manual system
Slots
Up to 25
Material roller
Anti-static PU
Aligning accuracy
Better than +/- 1°
Cleanroom designation
ISO 4
Status
Request information

Other products of interest

Webshop
WHS-A1-301
Automatic flat aligner
WHS
Automatic wafer flat aligner (WHS-A1) 76 mm (3”)
The WHS-A1 Serie AFEZ Advanced technology automatic wafer flat aligner for alignment from 76 mm up to 150 mm wafers.
76 mm (3”)
Automatic system
Up to 25
Antistatic Polyurethane
Better than +/- 1°
ISO 3 (Class 1 FS209E)
Webshop
WHS-A2-301
Manual flat aligner
WHS
Manual wafer flat aligner (WHS-A2) 76 mm (3”)
The WHS-A2 Serie MFEZ advanced technology manual wafer flat aligner for top/bottom alignment of 76 mm to 150 mm wafers.
76 mm (3”)
Manual system
Up to 25
Antistatic Polyurethane
Better than +/- 1°
ISO 4 (Class 10 FS209E)
Webshop
WHS-T3-301
Manual wafer transfer
WHS
Manual wafer transfer (WHS-T3) 76 mm (3”)
The T3 series 76 mm (3") is a precision manual horizontal bulk wafer slide transfer for safely transferring wafers between two SEMI compliant wafer cassett
76 mm (3”)
Manual system
Up to 25
Antistatic Polyoxymethylene
ISO 4 (FS209E Class 10)
Webshop
WHS-V6
Portable wand
WHS
Cordless portable vacuum wand (WHS-V6) base unit
The WHS-V6 Serie FWCR is advanced technology cordless portable battery-powered vacuum wand allows independance from vacuum lines. Provides mobility to go anywhe
Base unit can handle all wafer sizes and tips/cups
Cordless
Antistatic polycarbonate
All tips/cups
ISO 3 (Class 1 FS209E)