Applications:

• Alignment - Wafer flat and notch aligners are used in the semiconductor industry to ensure that wafers are oriented correctly during various processes, such as lithography, deposition, and etching. The flat aligner has a notch or flat that corresponds to the orientation of the wafer's crystal lattice structure. This is critical because the orientation of the wafer affects the performance and functionality of the final semiconductor device.
• Lot integrity - Aligners are also used in the semiconductor industry to aid operators in performing lot integrity checks. By rotating the wafer scribe, which is the identification marking on the wafer's edge, to be visible to the operator, the operator can verify that the correct lot of wafers is being loaded into a production tool. This is an important step in preventing errors and ensuring consistent product quality.
• Edge inspection - Wafer flat and notch aligners are also used in the semiconductor industry to inspect wafers for edge defects. This macro inspection procedure is usually done under a light source and involves examining the edges of the wafer for any chips, cracks, or other imperfections. This is an important step in preventing wafer breakage during subsequent processing steps, as edge defects can weaken the wafer and cause it to break or fail. By using wafer flat and notch aligners to identify and inspect these defects, operators can take steps to prevent further processing of defective wafers and avoid costly production delays.

The WHS-A6 series is an economical manual wafer flat aligner designed for precise top and bottom bulk alignment of wafers ranging from 76 mm (3") to 150 mm (6"). Ideal for semiconductor processes such as lithography, deposition, and etching, the WHS-A6 ensures accurate orientation of wafer flats, a critical step in optimizing the performance and functionality of semiconductor devices.

Built for SEMI-compliant wafer cassettes, the WHS-A6 features advanced abrasion-resistant and static dissipative stage and roller materials. Its antistatic design protects sensitive wafers by grounding both the wafer and cassette, providing reliable ESD protection in cleanroom environments.

Engineered for ISO 4 (Class 10 FS209E) cleanrooms, the WHS-A6 is designed to meet the stringent contamination control standards required in semiconductor manufacturing. The quick-disconnect roller assembly simplifies maintenance, minimizing downtime and ensuring a long operational lifespan.

In addition to alignment, the WHS-A6 is ideal for lot integrity checks and edge inspections. Its ergonomic design allows operators to efficiently perform wafer scribe checks and identify potential edge defects early, preventing costly wafer breakage and ensuring consistent product quality.

The WHS-A6 is manufactured in an ISO9001 certified facility, ensuring top quality control, and is CE certified for safety and performance. This makes the WHS-A6 a reliable and economical solution for precise wafer alignment, meeting international standards while maintaining cost-effectiveness for semiconductor manufacturing.