Applications
- Wafer inspection - Wafer presenters are used to hold and rotate wafers during inspection, allowing for automated and consistent macro analysis of wafer surfaces and features. Commonly seen in raw wafer production, post-epitaxial inspection, glass wafer haze, scratch, macro defect inspection, and lot process integrity inspections in Photolithography (photoresist) and Probe/Test areas (inking).
- Scratch reduction - Scratches on wafers can occur during handling and can result in defects and yield loss. Wafer presenters are designed to lift the wafer up from its cassette, allowing operators to access and handle the wafer without having to physically go between the wafers inside the cassette. This eliminates the need for operators to manually manipulate the wafer and reduces the risk of damage or contamination.
The WHS-P1 150 mm (6") is an automated single wafer presenter with rotation, engineered for precision handling and inspection of semiconductor wafers. Available for 76mm (3"), 100mm (4"), 150mm (6"), and 200mm (8") diameter wafers, the WHS-P1 system fully lifts a single wafer from its cassette, allowing operators to safely remove the wafer or perform detailed inspection. The system also features a 180° wafer flip function for backside inspection or processing.
Many utilize the WHS-P1 to flip or invert wafers within the same cassette, maintaining the original wafer slot orientation. This reorientation process takes only a couple of minutes per lot and can be executed with a separate program, improving operational flexibility while keeping the wafers properly positioned in their slots.
Constructed from antistatic materials, the WHS-P1 ensures optimal wafer protection by minimizing electrostatic discharge and physical damage. Its design meets ISO 3 cleanroom standards, making it suitable for sensitive semiconductor environments where contamination control is critical.
Applications include wafer inspection processes such as macro analysis of surfaces, scratch and defect detection, post-epitaxial inspection, and layer uniformity assessments. The automated lifting and rotation eliminate manual wafer manipulation, reducing the risk of scratches and handling errors.
The WHS-P1 is available with an optional cleanroom-grade stainless steel table, designed to mount the unit at the ideal ergonomic height for operators. Manufactured in an ISO9001 certified facility and CE certified, the WHS-P1 is designed for long-term performance in cleanroom environments.
