Applications:
- Alignment - Wafer flat and notch aligners are used in the semiconductor industry to ensure that wafers are oriented correctly during various processes, such as lithography, deposition, and etching. The flat aligner has a notch or flat that corresponds to the orientation of the wafer's crystal lattice structure. This is critical because the orientation of the wafer affects the performance and functionality of the final semiconductor device.
- Lot integrity - Aligners are also used in the semiconductor industry to aid operators in performing lot integrity checks. By rotating the wafer scribe, which is the identification marking on the wafer's edge, to be visible to the operator, the operator can verify that the correct lot of wafers is being loaded into a production tool. This is an important step in preventing errors and ensuring consistent product quality.
- Edge inspection - Wafer flat and notch aligners are also used in the semiconductor industry to inspect wafers for edge defects. This macro inspection procedure is usually done under a light source and involves examining the edges of the wafer for any chips, cracks, or other imperfections. This is an important step in preventing wafer breakage during subsequent processing steps, as edge defects can weaken the wafer and cause it to break or fail. By using wafer flat and notch aligners to identify and inspect these defects, operators can take steps to prevent further processing of defective wafers and avoid costly production delays.
The WHS-A3 series is a cutting-edge automatic wafer notch aligner, designed for accurate ±1° bulk alignment of 150 mm (6") notch wafers. This advanced system features a precision notch catch comb assembly, combined with an ESD-safe polyurethane roller, to ensure reliable and safe handling of sensitive semiconductor materials such as SiC, GaN, and GaAs. It is ideal for critical processes like lithography, deposition, and etching.
With a password-protected touchscreen interface, operators can access multiple alignment programs, including standard mode, thin/compound wafer alignment, and edge-inspection mode. The WHS-A3 offers exceptional flexibility for adapting to various wafer handling requirements, all while maintaining the highest precision.
Constructed with static dissipative materials, the WHS-A3 provides robust ESD protection by grounding both the wafer and cassette, safeguarding against electrostatic discharge during handling. This system is engineered to operate in ISO 3 (Class 1 FS209E) cleanroom environments, meeting the highest standards for contamination control.
The WHS-A3 also supports essential tasks like lot integrity checks and edge inspections, ensuring operators can identify and address wafer defects early in the process. Designed with easy maintenance in mind, it features a quick-disconnect roller assembly for fast and simple cleaning.
Manufactured in an ISO9001 and CE certified facility, the WHS-A3 meets rigorous international standards, making it the ideal solution for high-precision wafer alignment in demanding semiconductor production environments.
