Specifications:

• End Effector: Carbon Fiber / Backside Vacuum / Mapping
• ID Reader: Cognex or IOSS; OCR, Barcode, Data Matrix
• Throughput: 700 wph
• Facilities: 20-240VAC; Vacuum
• Communication: SECS GEM or Text Data Output
• Certification: CE

Wafer Handling System’s WHS-T4 model is a state-of-the-art solution specifically designed to streamline the wafer sorting process based on their IDs. With this system, users can effortlessly customize their wafer-lots by splitting, merging, sorting, compressing, or creating individual wafer-mixes based on their requirements. The system features two ergonomic tilt stage load- ports, linear robot, optical wafer notch/flat aligner and ID reader. It has the capability of dedicated size handling of 100 mm (4”), 150 mm (6”), 200 mm (8”) wafers, or a combination system for 150 mm and 200 mm without any hardware modification.

One of the key features of the WHS-T4 is its compact design, which occupies the smallest footprint sorter in the market, measuring 871 mm x 1700 mm x 373 mm (L x H x W). The system is compatible with silicon, glass, or compound wafers, with a thickness range of 220μ - 1000μ. The system is an automatic 25 slot cassette sorter, with the option for 12-,13-, 26-Slot cassettes. The system also features an optional internal wafer buffer stage which allows for sorting of 50-wafer size lots. The WHS-T4 features ESD-Safe technology, which helps prevent damage to wafers caused by electrostatic discharge. The WHS-T4 model also boasts an impressive throughput of up to 700 wafers per hour, making it an efficient and reliable solution for high-volume wafer sorting.