Applications:
- Training: Aluminum test wafers are used to train new operators on wafer handling techniques, allowing them to practice and develop their skills before handling more expensive and fragile production wafers.
- Automation Teach: Aluminum wafers are often used to teach robotic movements in automation, allowing engineers to test and refine robotic movements using durable aluminum wafers before moving on to more fragile and expensive silicon wafers.
- Protection: Aluminum wafers can be used as protective electrostatic chuck (PEC) wafers to cover fragile wafer chucks inside a process tool chamber when the tool is undergoing a chamber cleaning cycle, preventing damage to the sensitive chucks during the cleaning process.
The WHS-W-1201 is a 300 mm aluminum test wafer, with notch, bare - no finish coating, 300 mm diameter (+/-0.1 mm) x 0.8 mm thick, aluminum has been heat treated to make the crystalline structure more resistant to deformation and warping. For use in robot training, wafer handling training, carrier wafer, and for use as an PEC electrostatic chuck cover in chamber cleaning.
