The 4-gripper WHS-L3-6250 is a normally closed (consistent-force) side grip mechanical pick for handling 6”x6”x0.250” advanced EUV reticles from the tangential edge to reduce contamination by eliminating contact with chrome. Gripper placement is based on industry EUV reticle storage pods. Advanced gripper manufacturing for longevity, antistatic properties, and general chemical resistance. An ISO 3 design.
WHS
EUV mask grip - 6”x6”x0.250” (WHS-L3)
WHS
EUV mask grip - 6”x6”x0.250” (WHS-L3)
For handling advanced EUV masks
Compatible with EUV inner pod
Advanced anti-abrasion polymer materials
Static-dissipative construction
Ergonomically designed comfort
Tabletop holder included for cleanliness
ISO 3 engineering
Specifications
Brand
WHS
Product Number
WHS-L3-6250
Mask Size
6”x6”x0.250”
Grip hold
Side grip
Holder
With holder
Handling
Normally closed
Cleanroom designation
ISO 3
Status
Request information