Applications
- Shipping/receiving area: Wafer transfers are used to move incoming wafers from a shipping cassette to a WIP production cassette.
- Epitaxial area: Wafer transfers are used to move incoming wafers from a shipping cassette to a WIP production or specialty EPI process cassette.
- Wet chemistry areas: Wafer transfers are used to move wafers between a WIP production cassette to a wet process Teflon PFA cassette when they enter wet chemistry areas.
- Thermal process bake areas: Wafer transfers are used to move wafers between a WIP production cassette and metal or quartz cassettes when they enter thermal process bake process areas
- Metrology and inspection areas: Wafer transfers may also occur in metrology and inspection areas where wafers are analyzed and inspected for defects and other quality control measures.
- Probe and test areas: Wafer transfers are used to move incoming wafers from a shipping cassette to a WIP production cassette.
Material Stage: Anti-Static/Natural Polypropylene
Material Arm: ESD-Safe Polyoxymethylene
Type: Automatic System
Slots: Wafers For 25-Slot Cassettes
Precision automatic horizontal bulk wafer slide transfer for safely transferring 200 mm wafers between two SEMI compliant wafer cassettes. Compatible with high- and low-profile plastic process, metal cassettes and 200mm shipping cassettes. Features a touchscreen display, integrated SEND and RECEIVE stage cassette-in-place sensors and an adjustable transfer arm resistance sensor which monitors for excessive forces during motion. Antistatic and chemical resistant materials. ISO Class 4.
