The WHS-T4 is a state-of-the-art automatic wafer sorter designed to enhance wafer handling and sorting efficiency. Capable of handling 100 mm, 150 mm, or 200 mm wafers, with an optional dual 150 mm/200 mm configuration, the WHS-T4 provides users with flexibility in wafer processing without requiring hardware modifications. Users can effortlessly split, merge, compress, or create custom wafer mixes by sorting wafers based on their IDs, making it a versatile tool for semiconductor fabs.
The WHS-T4 features two ergonomic tilt-stage load ports, a linear robot, and an optical wafer notch/flat aligner for precise sorting. The system includes a standard ID reader, with customers having the choice between Cognex or IOSS brand readers for OCR, barcode, or data matrix recognition. SECSGEM software compatibility facilitates lot and ID tracking throughout the fab and allows for partial remote control of the system through an MRP system, ensuring seamless integration into production workflows.
Despite its advanced capabilities, the WHS-T4 maintains a compact footprint—just 871 mm x 1700 mm x 373 mm—ideal for cleanroom environments with limited space. The system can handle wafers ranging from 220μm to 1000μm in thickness and supports automatic sorting in 25-slot cassettes, with optional configurations for 12, 13, or 26-slot cassettes. It also features an optional internal wafer buffer stage for handling 50-wafer lots.
With a throughput of up to 650 wafers per hour and ESD-safe construction to protect against electrostatic discharge, the WHS-T4 delivers reliable, high-performance wafer sorting. Manufactured in an ISO9001 certified facility and CE certified, it ensures robust performance and long-term reliability in semiconductor manufacturing environments.
Specifications:
End effector: Antistatic carbon fiber
Materials, chuck: Stainless steel
Materials, stage: Anodized aluminum
ID Reader: Cognex or IOSS; OCR, Barcode, Data Matrix
Throughput: 700 wph
Facilities: 20-240VAC; Vacuum
Communication: SECS GEM or Text Data Output
Certification: CE
