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Manual wafer transfer
(2)
Automatic wafer transfer
(1)
Safeguard wafer transfer
(1)
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(1)
Material
Guides: Antistatic Polyoxymethylene /PEEK | Stage: Anodized aluminum
Stage: Antistatic Polyurethane w/Aluminum base | Guides: Antistatic Polyoxymethylene /PEEK
Wafer size
100 mm (4”)
150 mm (6”)
200 mm (8”)
300 mm (12")
76 mm (3”)
System
Automatic system
Slots
Up to 25
Material rods
Antistatic carbon fiber
Cleanroom designation
ISO 3 (Class 1 FS209E)

Safeguard wafer transfer

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SafeGuard wafer transfer (WHS-T1)
WHS-T1
Safeguard wafer transfer
WHS
SafeGuard wafer transfer (WHS-T1)
The T1 Series LCT2 is advanced technology automatic SafeGuard bulk wafer transfer for 76 mm up to 200 mm wafers.
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5 Options:
SafeGuard wafer transfer (WHS-T1) 300 mm (12")SafeGuard wafer transfer (WHS-T1) 76 mm (3”)SafeGuard wafer transfer (WHS-T1) 100 mm (4”)
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