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Wafer size
100 mm (4”)
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Slots
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Top/bottom
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Max. operating temp.
Up to 350°C
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Aluminum Process Cassettes
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Metal cassettes
Refine
Category
Replacement cassettes
(1)Aluminum cassettes
(8)Legacy cassettes
(2)Stainless steel cassettes
(1)300 mm cassettes
(1)Metal cassette handles
(3)Material
Aluminum
Wafer size
100 mm (4”)
150 mm (6”)
200 mm (8”)
76 mm (3”)
Slots
13
25
Top/bottom
End wall / H-bar
H-bar / H-bar
Handle
No
No handle
With handle
Yes
Max. operating temp.
Up to 350°C
Surface finish
Electroless Nickel (EN)
Hard Clear Anodized (HC)
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WHS-M1-13SLOTS
Aluminum cassettes
WHS
13-slots
Flat Slot
Webshop
WHS-M1-3inch
Aluminum cassettes
WHS
The WHS-M1 Series MCF is an all aluminum 100 mm (4") 25-slot metal cassette for processing semiconductor wafers in a thermal environment, up to 350° C.
Webshop
WHS-M1-3inch-EN
Aluminum cassettes
WHS
The WHS-M1 Series MCF is an all aluminum 100 mm (4") 25-slot metal cassette for processing semiconductor wafers in a thermal environment, up to 350° C.
Webshop
WHS-M1-4inch
Aluminum cassettes
WHS
The WHS-M1 Series MCF is an all aluminum 100 mm (4") 25-slot metal cassette for processing semiconductor wafers in a thermal environment, up to 350° C.
Webshop
WHS-M1-6inch
Aluminum cassettes
WHS
The WHS-M1 Series MCF is an all aluminum 150 mm (6") 25-slot metal cassette for processing semiconductor wafers in a thermal environment, up to 350° C.
Webshop
WHS-M1-8inch
Aluminum cassettes
WHS
The WHS-M1 Series MCF is an all aluminum 200 mm (8") 25-slot metal cassette with option a end wall handle for processing semiconductor wafers in a thermal