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Manual wafer transfer
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Automatic wafer transfer
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Safeguard wafer transfer
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Wafer sorter
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Material
Guides: Antistatic Polyoxymethylene | Stage: Natural Polypropylene
Wafer size
100 mm (4”)
150 mm (6")
150 mm (6”)
200 mm (8")
200 mm (8”)
76 mm (3”)
System
Automatic system
Slots
Up to 25
Material arm
Antistatic Polyoxymethylene
Cleanroom designation
ISO 4 (FS209E Class 10)

Automatic wafer transfer

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Automatic slide transfer (WHS-T2)
WHS-T2
Automatic wafer transfer
WHS
Automatic slide transfer (WHS-T2)
The T2 Series LCT1AS12 is a precision automatic horizontal bulk wafer slide transfer for safely transferring 76 mm up to 200 mm wafers between two SEMI complian
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4 Options:
Automatic slide transfer (WHS-T2) 76 mm (3”)Automatic slide transfer (WHS-T2) 100 mm (4”)Automatic slide transfer (WHS-T2) 150 mm (6”)
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Automatic wafer exchange system (WHS-T5)
WHS-T5
Automatic wafer transfer
WHS
Automatic wafer exchange system (WHS-T5)
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2 Options:
Automatic wafer exchange system (WHS-T5) 150 mm (6")Automatic wafer exchange system (WHS-T5) 200 mm (8")