Applications

• General use: Vacuum wands are utilized to pick up and transport wafers from one location to another without adding particles.
• Sorting: For manual wafer sorting applications, vacuum wands allow operators to move wafers safely and precisely within a parent lot. They can also be used to combine lots together, add test wafers, and replace any damaged wafers, as necessary.
• Inspection - Operators can use vacuum wands to pull out a wafer from a parent lot and inspect it under specialized lighting to look for defects. This ensures that the process has been successful and that the wafer meets the required specifications
• Rescue – Vacuum wands can be used to remove stranded substrates from cassettes, pods, and process tools when automation underperforms.

The WHS-V6 is an advanced cordless, battery-powered vacuum wand designed for flexible, portable wafer handling in cleanroom environments. Free from vacuum lines, it offers full mobility, making it ideal for wafer rescue, manual sorting, light production, and small device handling. The WHS-V6 is designed as a universal tool, allowing for quick change-out of vacuum tips or small device adapters, ensuring maximum compatibility with all WHS vacuum wand options. Models include WHS-V6-200 for handling 150 mm to 200 mm wafers and WHS-V6-300 for 300 mm wafers. The system can be purchased with vacuum tips or as a base unit for user customization.

The WHS-V6 also features a normally open vacuum flow system with an auto-on pick-up function, allowing operators to grab the wand from its charging base and use it immediately without manual activation. The tool automatically shuts off when placed back into the charging base, enhancing operator convenience. Additionally, the WHS-V6 includes an integrated battery level LED light bar, always providing real-time visibility of battery status.

Powered by a replaceable lithium-ion battery, the WHS-V6 delivers over 5 hours of continuous runtime per charge. Its wireless smart charging base prevents overcharging, extending battery life. The wand generates 600 mbar (17.7" Hg) barometric vacuum pressure for secure handling of wafers and small components.

An advanced H14 HEPA filter captures 99.99% of 0.3μm particles, ensuring optimal contamination control. With an ergonomic, ESD-safe design, the WHS-V6 provides maximum protection for operators and wafers.

Manufactured in an ISO9001-certified and CE-certified environment, the WHS-V6 offers a reliable, portable solution for cleanroom wafer and device handling.