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WHS-W-1201
300 mm wafers
WHS
For use in robot training, wafer handling training, carrier wafer, and for use as an electrostatic chuck cover in chamber cleaning.
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WHS-W-402
100 mm wafers
WHS
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WHS-W-601
150 mm wafers
WHS
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WHS-W-602
150 mm wafers
WHS
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WHS-W-801
200 mm wafers
WHS