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WHS-W-1201
300 mm wafers
WHS
For use in robot training, wafer handling training, carrier wafer, and for use as an electrostatic chuck cover in chamber cleaning.
300 mm (12”)
With SEMI notch
0.8 mm
No finish coating
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WHS-W-402
100 mm wafers
WHS
100 mm (4")
with SEMI flat
0.8 mm
No finish coating
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WHS-W-601
150 mm wafers
WHS
150 mm (6")
With SEMI notch
0.8 mm
No finish coating
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WHS-W-602
150 mm wafers
WHS
150 mm (6")
with SEMI flat
0.8 mm
No finish coating
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WHS-W-801
200 mm wafers
WHS
200 mm (8")
With SEMI notch
0.8 mm
No finish coating