Test wafers

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WHS-W-1201
300 mm wafers
WHS
Aluminum test wafer bare, with SEMI notch (WHS-W) 300 mm (12”)
For use in robot training, wafer handling training, carrier wafer, and for use as an electrostatic chuck cover in chamber cleaning.
300 mm (12”)
With SEMI notch
0.8 mm
No finish coating
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WHS-W-402
100 mm wafers
WHS
Aluminum test wafer bare, with SEMI flat (WHS-W) 100 mm (4")
100 mm (4")
with SEMI flat
0.8 mm
No finish coating
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WHS-W-601
150 mm wafers
WHS
Aluminum test wafer bare, with SEMI notch (WHS-W) 150 mm (6")
150 mm (6")
With SEMI notch
0.8 mm
No finish coating
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WHS-W-602
150 mm wafers
WHS
Aluminum test wafer bare, with SEMI flat (WHS-W) 150 mm (6")
150 mm (6")
with SEMI flat
0.8 mm
No finish coating
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WHS-W-801
200 mm wafers
WHS
Aluminum test wafer bare, with SEMI notch (WHS-W) 200 mm (8")
200 mm (8")
With SEMI notch
0.8 mm
No finish coating