Applications
- General use: Vacuum wands are utilized to pick up and transport wafers from one location to another without adding particles.
- Sorting: For manual wafer sorting applications, vacuum wands allow operators to move wafers safely and precisely within a parent lot. They can also be used to combine lots together, add test wafers, and replace any damaged wafers, as necessary.
- Inspection - Operators can use vacuum wands to pull out a wafer from a parent lot and inspect it under specialized lighting to look for defects. This ensures that the process has been successful and that the wafer meets the required specifications
- Rescue – Vacuum wands can be used to remove stranded substrates from cassettes, pods, and process tools when automation underperforms.
The WHS-V7 is a high-performance tabletop portable vacuum wand engineered for demanding wafer handling and small device management in cleanroom environments. With its powerful 800 mBar (23.6” Hg) vacuum, the WHS-V7 is designed to meet the rigorous demands of full production applications, making it ideal for heavy-duty tasks beyond simple wafer rescue or light production. Its portable, self-contained design provides independence from vacuum lines, allowing for complete mobility and continuous operation in high-production environments.
The WHS-V7 is available in several models: WHS-V7-300 for 300 mm wafers, WHS-V7-200 for 200 mm wafers, and the base WHS-V7 model for user customization with various vacuum tips. Additionally, the WHS-V7-SD model includes vacuum cups and small device adapters, offering precision handling of die, packages, optics, and other small components. This compatibility with all WHS vacuum wand tips and adapters ensures adaptability for a wide range of applications.
With a high-performance battery providing over 20 hours of continuous runtime per charge, the WHS-V7 is optimized for extended use in cleanroom environments. The system features a normally open vacuum flow with an auto-on pick-up feature allowing for instant operation when removed from its holder, while an automatic shutoff saves energy when the tool is not in use.
The advanced H14 HEPA filter captures 99.99% of 0.3 μm particles, ensuring contamination control in ISO 3 (FS209E Class 1) cleanroom standards. The WHS-V7’s ESD-safe design, ergonomic construction, and universal power compatibility make it an ideal solution for full-scale production wafer handling and small device applications.
Manufactured in an ISO9001-certified and CE-certified environment, the WHS-V7 sets the standard for high-performance vacuum wands in demanding production settings.
