Wafer Aligners

Unlocking Precision and Efficiency in Semiconductor Manufacturing

Meeting Semiconductor Needs with Precision:

The WHS-A Wafer Aligner Portfolio

Wafer Handling Systems (WHS) presents the WHS-A wafer aligner portfolio, a suite of products meticulously crafted to fulfill the high-precision demands of the semiconductor industry, particularly in bulk, flat and notch alignment. These aligners, integral to semiconductor processes, guarantee lot integrity, precise alignment, and edge inspection, ensuring the production of top-quality semiconductors within the confines of cleanroom environments 

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Maintaining Lot Integrity

One crucial aspect of semiconductor manufacturing is ensuring lot integrity, preventing errors, and upholding consistent product quality. WHS aligners facilitate this by rotating the wafer scribe, exposing its identification marking on the wafer's edge. This allows operators to verify the correct lot of wafers, averting potential issues down the production line. 

High-Precision Alignment Technology

Alignment is pivotal in semiconductor manufacturing, influencing the performance and functionality of the final semiconductor device. WHS aligners, exemplified by the A1 and A3 series, deliver precise bulk alignment during critical processes such as lithography, deposition, and etching. These aligners incorporate notches or flats that align with the wafers's crystal lattice structure, guaranteeing the correct orientation and optimal results. 

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Edge Inspection for Quality Assurance

Edge inspection is an indispensable step in identifying defects that could compromise the wafer's structural integrity and potentially lead to breakage or failure during subsequent processing. WHS aligners enable macro inspection of wafer edged under specialized lighting, allowing operators to pinpoint chips, cracks, or imperfections. Detecting and addressing these issues at this stage prevents costly production delays and waste.

Diverse Aligner Models to Suit Every Need

WHS offers a diverse array of aligner models to cater to various customer requirements. The A1 and A3 series, for example, are automatic tabletop aligners suitable for wafers ranging from 76 mm to 200 mm. These aligners come equipped with programmable stop positions, user-friendly touch screen displays, and the ability to function seamlessly within cleanroom environments, all while ensuring alignment precision within a remarkable tolorance of +/- 1º

The A2 and A4 series, on the other hand, are manual tabletop aligners enfineered for top/bottom bulk alignment across different wafer sizes within cleanroom settings. These aligners feature antistatic construction, ESD-safety control, and quick-disconnect roller assemblies for simplified maintenance and cleaning.

The A6 series rounds out the offerings, providing an exonomical solution for 76 mm, 100 mm, and 150 mm wafers.

 

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WHS: Prioritizing Quality and Customer Satisfaction

WHS stands apart through its commitment to cleanroom compatibility, enduring engineering, and extensive industry expertise. Their aligners are meticulously designed with cleanroom-compatible materials, ensuring both longevity and top-notch performance. Functionality takes precedence in their design philosophy, with aesthetics considered only after tools are perfected. WHS consistently endeavors to enhance their products in keeping with advancing technologies, aspiring to become the preferred source for substrate handling solutions in the semiconductor industry.