Photomask Handling

Introducing the WHS-L Series

Photomask Handling Excellence

Introducing the WHS-L Series

When it comes to precision and care in photomask handling, WHS leads the way with the WHS-L series. Designed to meet the exacting demands of the semiconductor industry, the WHS-L1, WHS-L2 and WHS-L3 models are the ultimate tools for handling valuable photomasks and reticles. They minimize contamination risk and prevent electrostatic discharge (ESD) damage to critical chrome layers, ensuring that your photomasks remain pristine.

 

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WHS-L1 Series
Standard Excellence

The WHS-L1 series is the go-to choice for most photomask handling situations, providing a side-profile grip that ensures maximum safety. This standard tool never positions you directly over the mask, reducing the risk of contamination. Its opening and closing mechanism is encapsulated and geared for precise operation and cleanliness, adhering to the highest industry standards.
 

WHS-L2 Series
Specialized Versatility

The WHS-L2 series is designed for specialized applications where a horizontal offset is needed. This tool is ideal when accessing mask from the side profile is not feasible, offering flexibility for unique handling requirements. Its design allows for mask placement in special carriers, metrology tool stages, and mask cleaning equipment, making it an excellent choice for applications where standard tools don't fit in.

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WHS-L3 Series
Precision for EUV Masks

The WHS-L3 series is specifically engineered for Extreme Ultraviolet (EUV) masks. With four low-profile grippers that interface seamlessly, with EUV reticle pods, the WHS-L3 provides secure and stable manipulation of these advanced masks. It's constructed with high-quality materials, offering durability, ESD safety, and a compact design suited for efficient cleanroom operations.

 

Applications Tailored to Perfection

The WHS-L Series excels in a variety of critical applications:

  • Transfer: Securely transfer photomasks between storage and production boxes, protecting them from damage.
  • Inspection: Conduct macro inspections for bar code ID's, particles, chrome defects, contamination, or pellicle frame damage with confidence.
  • Mask Aligners: Streamline photolithography mask aligner tool loading and unloading
  • Metrology: Simplify loading and unloading for microscopes and other metrology tools used in mask inspection.
  • Cleaning: Handle photomasks during spot cleaning or solvent submersion cleaning processes without compromising their intergrity.
  • Mask Shops: Trusted in manufacturing and mask repair environments, out tools ensure safe and secure mask handling.
     

Applications Tailored to Perfection

At WHS, we prioritize precision, cleanliness, and innovation in semiconductor manufacturing. Our photomask handling tools embody these principles, providing unparalleled accuracy, efficiency, and care. With the WHS-L1, WHS-L2, and WHS-L3 series, you can revolutionize your photomask handling processes and take your production to the next level. Your journey to excellence in photomask handling begins here.